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Problem Wafer Glass of 1.1 mm engraving

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Can you please help me with engraving a wafer glass of 1.1mm, i have already engraved some but the problem is when i engrave for exemple 123456
The number 1 or 6 got broken a little bit, is there a way for engraving with bas results of this small area of engraving , iam using 150 speed and 13 power , scan gap 0.55.

Laser machine Xyz exlas 90/60 power 80watts

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